Wafer with thermocouple (TC)
Directly embedded temperature sensors in the wafer enable direct in-situ wafer temperature measurement.
The sensors are highly reliable and are placed directly on the measured wafer, allowing them to provide the actual temperature at the exact location where they are positioned. They can also accurately measure the temperature profile of the wafer and continuously monitor the temperature changes throughout the complete thermal cycle, including transient states such as ramping up, cooling down, and delay periods.
- Company：インターテック販売 東京本社（拠点－関西営業所、熊本営業所）
- Price：Other
